Excimer irradiation equipment - List of Manufacturers, Suppliers, Companies and Products

Rental of scan-type excimer irradiation equipment for R&D.

It is possible to experimentally verify excimer cleaning surface modification using only a 100V power supply utility.

This device integrates an excimer irradiation unit with a main wavelength of 172 nm, a scanning stage, and an ozone decomposition device, allowing for easy and safe experiments on excimer surface modification using only a 100V power supply. **Features** The scanning stage enables processing of larger areas compared to conventional methods. The integrated ozone decomposition device eliminates the need for exhaust equipment.

Company：あすみ技研
Price：10,000 yen-100,000 yen

Other surface treatment equipment
Excimer irradiation equipment

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Excimer irradiation device, tube type

Generates vacuum ultraviolet light with a wavelength higher in energy than conventional mercury lamps!

The excimer irradiation device from Quark Technology Co., Ltd. generates excited oxygen atoms necessary for organic cleaning and surface modification using a high photon energy vacuum ultraviolet light source from excimer lamps. It is utilized in various devices, including semiconductor manufacturing equipment and film surface modification systems. It has good energy conversion efficiency with quasi-monochromatic light, and relatively little unwanted visible and infrared light compared to other discharge lamps, which prevents thermal damage to the workpiece. Additionally, it can instantaneously turn on and off without damaging the excimer lamp. Moreover, high-efficiency cleaning allows for irradiation during conveyor transport. We also offer flat types of excimer irradiation devices with different features, so please choose according to your application. 【Features】 ■ Quasi-monochromatic light ■ Wavelength 172nm ■ Instantaneous on/off ■ Irradiation during conveyor transport is possible ■ Reduced number of lamps, no auxiliary equipment required *For more details, please refer to the catalog or feel free to contact us.

Company：クォークテクノロジー
Price：Other

Semiconductors and ICs
Optical Components
Electronic Components
Excimer irradiation equipment

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Excimer irradiation device

Achieve damage-free cleaning and modification in a short time with high-energy excimer (VUV) light. Low-temperature treatment that minimizes thermal effects.

This product is a device that can chemically clean and modify the surfaces of materials such as glass, substrates, films, and sheets. It employs a mercury-free dielectric barrier discharge excitation lamp, which maintains a low lamp temperature during emission and allows for low-temperature processing due to its single wavelength of 172 nm, minimizing thermal effects. It can generate high concentrations of reactive oxygen species and various radicals in a short time, while simultaneously breaking the chemical bonds of organic substances on the substrate to promote oxidation, decomposition, and volatilization, enabling the removal of organic materials with high precision and in a short time while minimizing damage. Additionally, it allows for instant lighting at the required timing for processing, contributing to reduced environmental impact and lower running costs. 【Features】 ■ High photon energy ■ Single wavelength ■ Low-temperature irradiation ■ Instant lighting and flashing ■ Mercury-free *For more details, please download the PDF or feel free to contact us.